power in the radial line slot antenna source was 3000 W and the flow rate of arsine was 0.7 sccm diluted in 999.3 sccm he-lium with a process pressure of 150 mTorr. SIMS measured profiles for blanket wafer (fin top) doping are presented in Fig. 1 for both pre- and post-anneal conditions. Figure 2 is a On the Near-Field Shaping and Focusing Capability of a Radial ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION Microwave power coupling in a surface wave excited plasma density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber. Simulation of microwave pulsing in a radial line slot antenna ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.
the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested.
Plasma etching: Yesterday, today, and tomorrow Sep 5, 2013 ... Plasma etching, a revolutionary extension of the technique of physical ..... chamber with a radial-line slot antenna, utilizing a 2.45GHz. Experimental and Numerical Investigations of Line ... - (PIER) Journals Sep 15, 2015 ... Results showed that, a uniform line-shaped plasma is generated as waveguide ... gas through slot-antenna, is suitable for large area plasma generation ..... radial plasma density profiles in low-pressure surface wave plasma ...
Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays
Radiation from a slot antenna in a ground plane covered by a ... RADIATION FROM A SLOT ANTENNA IN A GROUND PLANE COVERED BY A WARM PLASMA LAYER* by Nor man C. Wenger Lewis Research Center SUMMARY The electromagnetic properties of a model of a reentry plasma layer are determined by using the linearized hydrodynamic equations for a single fluid warm plasma medium. Implementation of atomic layer etching of silicon: Scaling ...
Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ...
A Millimeter-Wave Cavity-Backed Suspended Substrate ... A Millimeter-Wave Cavity-Backed Suspended Substrate Stripline Antenna Rainee N. Simons Dynacs Engineering Company, Inc., Brook Park, Ohio ... Recently a radial line slot antenna array has been demonstrated to have high gain and effi- ... A Millimeter-Wave Cavity-Backed Suspended Substrate Stripline Antenna 6. AUTHOR(S) Characteristics of large-diameter plasma using a radial-… The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity controlLarge volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes... Radial line slot antenna plasma source • Radial line slot antenna (RLSA) • Microwave plasma in semiconductor. processing tool • Coupling and operation modes • Major challenges – plasma tools • Model – implemented in Plasma Module by. COMSOL – user experience • Conclusion remarks.
The radial line slot antenna plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature.
The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed. TM CVD Processes in Ar+H2+SiH4+C2H6 and Dopant Gas Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is TEL Announces Release of New Plasma Nitridation System ...
An integrated planar antenna-mixer device for microwave reception utilizes a slot-ring antenna and a diode quad connected thereto. The device comprises a planar metallic sheet backed on one side by a dielectric layer. Advances in Noise Analysis | Mosfet | Field Effect Transistor Figure 7. Vth distributions of p‐Mosfets fabricated by applying (a) conventional plasma processes and (b) radial line slot antenna plasma processes plotted for antenna ratio of 23, 100, 1000, and 10,000. Radioengineering - December 2014, Volume 23, Number 4 Borowiec, R. , Kucharski, A. A. , Slobodzian, P. M. Slot excited dielectric resonator antenna above a cavity analysis and experiment.